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Wednesday, May 13, 2020 | History

2 edition of Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon found in the catalog.

Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon

James D. Patterson

Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon

by James D. Patterson

  • 219 Want to read
  • 8 Currently reading

Published by National Aeronautics and Space Administration, Langley Research Center, Available from National Technical Information Service in Hampton, Va, Springfield, Va .
Written in English

    Subjects:
  • Fabry-Perot interferometers.,
  • Microelectromechanical systems.,
  • Silicon -- Mechanical properties.,
  • Silicon -- Optical properties.

  • Edition Notes

    StatementJames D. Patterson.
    SeriesNASA technical paper -- 3702
    ContributionsLangley Research Center.
    The Physical Object
    Paginationxii, 93 p. :
    Number of Pages93
    ID Numbers
    Open LibraryOL20704750M

    An electrically tunable infrared (IR) filter based on the liquid crystal (LC) Fabry–Perot (FP) key structure, which works in the wavelength range from to 12 μm, is designed and fabricated successfully. Both planar reflective mirrors with a very high reflectivity of ∼95%, which are shaped by depositing a layer of aluminum (Al) film over one side of a double-sided polished zinc .   A micromachined based narrow band Fabry–Perot tunable bandpass filter is designed, fabricated and measured. The narrow bandpass characteristic is due to the cavity formed in the bandgap structures by the insertion of a transmission line resonator between the two Bragg reflectors. The parametric analyses of the Fabry–Perot electromagnetic bandgap (EBG) filter Cited by: 4.

      Mechanical properties and tuning ability of MEMS based Fabry-Perot optical filter with electrostatic actuation are investigated. The simulation results demonstrate that the fringing field influence should be taken into account in structure design and modeling. MICRO-MECHANICAL VOLTAGE CONTROLLED TUNABLE FILTERS FORMED IN GAAS Tunable optical filters are vital components for various applications, such as optical sensing and dense wavelength division multiplexed optical networks. GaAs MOEMS are desired because of their enhanced electrical properties, wide tuning range, robust design, and high yield. The.

    The salient features of the book include: Tutorial approach. The book emphas. Download free Ebook PDF On our site we have the best collection of books, descriptions, reviews of the books and their authors Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in () Silico Adaptive Structures: Engineering Applications. OptiSystem component library includes different types of components for WDM systems, the tunable optical filters include Fabry-Perot filters, Mach-Zehnder interferometers, and grating based filters. Fabry-Perot filters. Fabry-Perot shows the transmission of a Fabry-Perot filter used as a tunable optical filter (see Figure 1). The.


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Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon by James D. Patterson Download PDF EPUB FB2

The MEMS (Micro-Electro-Mechanical-Systems) technology is quickly evolving as a viable means to combine micro-mechanical and micro-optical elements on the same chip. One MEMS technology that has recently gained attention by the research community is the micro-mechanical Fabry-Perot optical by: A. Transmission spectra for a 1 µm air gap Fabry-Perot at zero bias.

The gold thickness is 20 nm. The finesse of the Fabry-Perot is B. Reflection spectra for a 1 µm air gap Fabry-Perot at zero bias. The gold thickness is 20 nm. The methods for micro-mechanical Fabry-Perot filter fabrication recently reported in the literature require many (10 to 44 layers) deposited or grown layers to form the DBR (Distributed Bragg Reflector) mirrors and to provide the sacrificial layer for the air gap.

Consequently, the fabrication of these Fabry-Perots is complex and Size: 5MB. The methods for micro-mechanical Fabry-Perot filter fabrication recently reported in the literature require many (10 to 44 layers) deposited or grown layers to form the DBR (Distributed Bragg Reflector) mirrors and to provide the sacrificial layer for the air gap.

Consequently, the fabrication of these Fabry-Perots is complex and by: Tunable Fabry-Perot Filter Using Hybrid Integrated Grating and Slot Microstructures Yu-Sheng Lin and Chengkuo Lee, Member, IEEE Abstract—The design, fabrication, and characterization of an electro-statically tunable optical Fabry–Perot (FP) filter with hybrid integration of grating and slot structures are presented.

Using deep reactive ion. In this work we report on micromechanically tunable Fabry–Pérot filter concepts for wavelength division multiplexing (WDM) systems. The optical resonator is designed for a cavity length around 30 μm in order to increase the filter selectivity while relaxing the demands on the required mirror by: 5.

FFP-TF2 Fiber Fabry-Perot Tunable Filter Technical Reference 7/ Rev_A Micron Optics, Inc. The filter resonance matches the input wavelength at each blue vertical line. PZT Displacement vs. Input Voltage: A good “rule of thumb” to keep in mind is volts per FSR for most of our optical Size: 94KB.

Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in () Silico Adaptive Structures: Engineering Applications; Intelligent Sensor Networks: The Integration of Sensor Networks, Signal Pro Food Processing Technology: Principles and Practice; Mechanical Engineer's Pocket Book.

The key to the simple and elegant design of the FFP tunable filter is the lensless all- fiber construction. There are no collimating optics or lenses, thus with the FFP tunable filter Micron Optics has eliminated the pitfalls of other Fabry-Perot component technologies, including misalignment, environmental sensitivity, and extraneous modes.

Etalons are widely used in telecommunications, lasers and spectroscopy to control and measure the wavelengths of light. Recent advances in fabrication technique allow the creation of very precise tunable Fabry–Pérot interferometers.

The device is called an interferometer when the distance between the two surfaces. MEMS-based Fabry-Perot optical filters consist of a vertically integrated structure composed of two mirrors separated by an air gap.

Wavelength tuning is achieved by applying a voltage between the two mirrors resulting in an attractive electrostatic force which pulls the. The actuator stage is designed to increase the Fabry-Pérot gap between the cubes in a micron scale and to make an electromechanically tunable Fabry-Pérot interferometer; therefore, transmission peak wavelength shifts toward longer wavelengths with increasing drive voltage.

MEMS tunable filters made of multiple thin films deposited on microstructure have been Cited by: 7. Micro-optical tunable Fabry-Perot filters, which utilize micro-electro-mechanical control of the cavity length and therefore the active wavelengths, are attractive components for wavelength.

Find many great new & used options and get the best deals for Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in Silicon by James D. Patterson (, Paperback) at the best online prices at eBay. Free shipping for many products.

Fabry-Perot (F-P) interferometer was the simplest filter, in principle, used as an optical filter. This paper deals with using a liquid crystal-filled F-P filter to achieve a low-voltage-tunable.

Get this from a library. Micro-mechanical voltage tunable Fabry-Perot filters formed in () silicon. [James D Patterson; Langley Research Center.].

In general, according to one aspect, the invention features a multi-cavity Fabry-Perot filter. The filter comprises a first electrostatically deflectable membrane device. A curved mirror structure is formed on its optical membrane. Similarly, a second electro-statically deflectable membrane device is provided, Cited by: Tunable infrared detector with integrated micromachined Fabry-Perot filter Norbert Neumanna, Martin Ebermanna, Karla Hiller b, Steffen Kurth c a InfraTec GmbH, Dresden, Germany b Chemnitz Univ.

of Technology, Center for Microtechnologies, Chemnitz, Germany c Fraunhofer Institute for Reliability and Microintegration, Chemnitz, Germany ABSTRACT This paper.

A monolithically constructed infrared, tunable Fabry-Perot cavity filter-detector for spectroscopic detection of particular substances having an absorption line Cited by: Tunable Micro-Electro Mechanical Fabry Perot Etalon By Annette O. Rivas Submitted to the Chester F.

Carlson Center for Imaging Science in partial fulfillment of the requirements for the Masters of Science at the Rochester Institute of Technology Abstract Many different devices capable of spectral wavelength collection exist.

Several require. Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in () Silicon avg rating — 0 ratings — published Want to Read saving /5.So far a lot ofefforts have been made to make tunable filters based on Fabry-Perot principle[2,3,4]. The tunable optical filters using a LiNbO3 torsional actuator{2] need a high driving voltage up to volts and has a narrow tunable range.

The tunable filter[4] reported by M. lodice is a temperature-tuned silicon etalon filter with a narrow.The tunable fiber Fabry-Perot filter has a -3 dB bandwidth of about GHz. NIST's fiber Fabry-Perot filtered laser shows the lowest minimum transmittance. Round Robin for Optical Fiber Bragg Grating Metrology.